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center;font-size: 0.9em;color: #666;margin-top: 8px\">\u7eb3\u7c73\u8fd9\u4e2a\u6570\u5b57\uff0c\u662f\u4e2a\u8425\u9500\u8bcd<\/figcaption><\/figure>\n\n\n<p>\u8fd9\u662f\u6211\u88ab\u95ee\u5230\u8fc7\u5f88\u591a\u6b21\u7684\u4e00\u4e2a\u8bef\u533a\u3002<\/p>\n\n<p>\u201c3\u7eb3\u7c73\u82af\u7247\u201d\uff0c\u4e0d\u662f\u8bf4\u6676\u4f53\u7ba1\u91cc\u67d0\u4e2a\u4e1c\u897f\u771f\u67093\u7eb3\u7c73\u5bbd\u3002\u8fd9\u4e2a\u547d\u540d\u66f4\u50cf\u4e00\u79cd\u4ee3\u9645\u4ee3\u53f7\uff0c\u8ddf\u5b9e\u9645\u7269\u7406\u5c3a\u5bf8\u65e9\u5c31\u8131\u94a9\u4e86\u3002\u5382\u5546\u62ff\u5b83\u6765\u6807\u4e00\u4ef6\u4e8b\uff1a<strong>\u540c\u7b49\u9762\u79ef\u4e0b\uff0c\u80fd\u585e\u8fdb\u53bb\u7684\u5f00\u5173\u66f4\u591a\uff0c\u800c\u4e14\u66f4\u7701\u7535<\/strong>\u3002<\/p>\n\n<p>\u6709\u610f\u601d\u7684\u662f\uff0c\u6570\u5b57\u8d8a\u53eb\u8d8a\u5c0f\uff0c\u53ef\u201c\u53d8\u5c0f\u7684\u65b9\u5f0f\u201d\u53d8\u4e86\u597d\u51e0\u56de\u3002\u65e9\u5e74\u7684\u5e73\u9762\u6676\u4f53\u7ba1\u662f\u8eba\u5728\u7845\u7247\u4e0a\u7684\uff0c\u6805\u6781\u76d6\u5728\u6c9f\u9053\u4e0a\u65b9\u3002\u540e\u6765\u4e0d\u884c\u4e86\uff0c\u6c9f\u9053\u592a\u77ed\uff0c\u6805\u6781\u7ba1\u4e0d\u4f4f\u7535\u6d41\uff0c\u50cf\u5835\u4e0d\u4f4f\u7684\u6c34\u9f99\u5934\u3002\u90a3\u5c31\u628a\u6c9f\u9053\u7acb\u8d77\u6765\uff0c\u6805\u6781\u4ece\u4e09\u9762\u62b1\u4f4f\u5b83\u2014\u2014\u8fd9\u5c31\u662fFinFET\uff0c\u9ccd\u5f0f\u3002<\/p>\n\n<p>\u518d\u5f80\u524d\u8d70\uff0c\u4e09\u9762\u4e5f\u4e0d\u591f\uff0c\u5f97\u56db\u9762\u5168\u5305\u3002\u4e8e\u662f\u7eb3\u7c73\u7247\u3001\u73af\u7ed5\u6805\u6781\u8fd9\u4e9b\u4e1c\u897f\u5c31\u51fa\u6765\u4e86\u3002\u6362\u540d\u5b57\u4e0d\u662f\u8d76\u65f6\u9ae6\uff0c\u662f\u771f\u7684\u6362\u4e86\u7ed3\u6784\u3002<\/p>\n\n<h2>\u5361\u70b9\u4e0d\u5728\u8bbe\u8ba1\uff0c\u5728\u90a3\u675f\u5149<\/h2>\n\n<p>\u8bbe\u8ba1\u82af\u7247\u96be\u5417\uff1f\u96be\u3002\u4f46\u8bbe\u8ba1\u5de5\u5177\u3001\u67b6\u6784\u3001\u9a8c\u8bc1\u6d41\u7a0b\uff0c\u8fd9\u4e9b\u662f\u53ef\u4ee5\u5b66\u3001\u53ef\u4ee5\u8fed\u4ee3\u7684\u3002<\/p>\n\n<p>\u771f\u6b63\u8ba9\u4eba\u7edd\u671b\u7684\u662f\u5149\u523b\u3002<\/p>\n\n<p>\u4f60\u60f3\u60f3\u5de5\u827a\u8def\u5f84\uff1a\u5728\u7845\u7247\u4e0a\u94fa\u4e00\u5c42\u5149\u523b\u80f6\uff0c\u62ff\u5149\u53bb\u7167\uff0c\u88ab\u7167\u5230\u7684\u5730\u65b9\u6027\u8d28\u53d8\u4e86\uff0c\u518d\u663e\u5f71\u3001\u523b\u8680\uff0c\u56fe\u6848\u5c31\u8f6c\u5370\u4e0b\u53bb\u4e86\u3002\u51e0\u767e\u4ebf\u4e2a\u6676\u4f53\u7ba1\uff0c\u5c31\u662f\u8fd9\u4e48\u4e00\u5c42\u5c42\u5370\u51fa\u6765\u7684\uff0c\u51e0\u5341\u4e0a\u767e\u5c42\u53e0\u4e0a\u53bb\uff0c\u5c42\u4e0e\u5c42\u4e4b\u95f4\u8fd8\u5f97\u5bf9\u9f50\uff0c\u8bef\u5dee\u8981\u538b\u5230\u51e0\u4e2a\u539f\u5b50\u90a3\u4e48\u5c0f\u3002<\/p>\n\n<p>\u90a3\u5149\u672c\u8eab\u7684\u6ce2\u957f\uff0c\u5c31\u6210\u4e86\u5929\u82b1\u677f\u3002\u6ce2\u957f\u592a\u957f\uff0c\u753b\u4e0d\u51fa\u7ec6\u7ebf\u3002<\/p>\n\n<p>\u6240\u4ee5\u6709\u4e86EUV\u3002\u6781\u7d2b\u5916\uff0c13.5\u7eb3\u7c73\u3002\u95ee\u9898\u6765\u4e86\uff1a\u8fd9\u4e2a\u6ce2\u957f\u7684\u5149\uff0c\u51e0\u4e4e\u4ec0\u4e48\u90fd\u5438\u6536\u3002\u7a7a\u6c14\u5438\u6536\uff0c\u73bb\u7483\u5438\u6536\uff0c\u8fde\u900f\u955c\u90fd\u5438\u6536\u3002\u6240\u4ee5EUV\u5149\u523b\u673a\u91cc\u4e0d\u80fd\u7528\u900f\u955c\uff0c\u53ea\u80fd\u9760\u4e00\u5c42\u5c42\u9540\u4e86\u51e0\u5341\u5bf9\u94bc\u7845\u8584\u819c\u7684\u53cd\u5c04\u955c\uff0c\u628a\u5149\u53cd\u5f39\u7740\u8d70\u3002\u771f\u7a7a\u73af\u5883\uff0c\u955c\u9762\u7c97\u7cd9\u5ea6\u63a7\u5236\u5728\u539f\u5b50\u7ea7\u522b\u3002<\/p>\n\n\n\n<figure 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